New Publication in industry magazine „microProduction“

News_Bild_Web_MicroProduction
2025-10-10

Eitzenberger’s Dynamic Waferstage with dual impulse decoupling is featured in the latest issue of the industry magazine microProduction. This innovative development significantly enhances both dynamics and precision in laser micromachining.

With a fully impulse-decoupled, air-bearing positioning system, the Dynamic Waferstage minimizes unwanted vibrations while boosting travel speed and process stability — setting new standards in high-performance motion systems.

The result:

  • Improved beam positioning on the wafer plane
  • Higher process reliability in complex laser trimming applications
  • Optimized machining quality at maximum dynamics

The article also explores how this technology is being applied in high-precision manufacturing — for example, in 3D-Micromac AG’s microVEGA FC systems for link trimming.

🔗 Read the full article (PDF Link)

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