New Publication in industry magazine „microProduction“

News_Bild_Web_MicroProduction
2025年10月10日

Eitzenberger’s Dynamic Waferstage with dual impulse decoupling is featured in the latest issue of the industry magazine microProduction. This innovative development significantly enhances both dynamics and precision in laser micromachining.

With a fully impulse-decoupled, air-bearing positioning system, the Dynamic Waferstage minimizes unwanted vibrations while boosting travel speed and process stability — setting new standards in high-performance motion systems.

The result:

  • Improved beam positioning on the wafer plane
  • Higher process reliability in complex laser trimming applications
  • Optimized machining quality at maximum dynamics

The article also explores how this technology is being applied in high-precision manufacturing — for example, in 3D-Micromac AG’s microVEGA FC systems for link trimming.

🔗 Read the full article (PDF Link)

Anfrage

Unsere Datenschutzerklärung finden Sie hier.

Wir freuen uns auf Ihre Anfrage

oder Kontaktieren sie uns direkt ...

Ansprechpartner

Tobias Seemiller
Tel.: +49 8809 329-36
tobias.seemiller@eitzenberger.com

Cookie Consent with Real Cookie Banner