Focus Axis
EZ-5504 | Key Features
- Compact Design
- Stroke 18 mm
- Position Accuracy << 100 nm
- Dynamic Movement via Voice Coil
- Permanent Magnetic Weight Compensation
- For Optics up to 300 g
Downloads
Product description
With the EZ-5504 focus axis, EITZENBERGER has implemented a completely new and innovative axis concept. Compact dimensions of 99 x 99 x 80 mm (L x W x H) and a central, continuous opening of approx. 35 mm for optical components are the external features. The slip-stick-free air bearing enables maximum precision and repeatability in the nanometer range over the entire stroke range of 18 mm. In addition to the extremely low positioning error, the low tilting error of the axis is particularly noteworthy. The focus axis is permanently magnetically weight-compensated and designed for a payload of 250 g. The weight compensation is adjustable for masses from 50 to 300 g. The focus axis can be moved dynamically via a voice coil motor. A Renishaw measuring head with a resolution of 1 nm and a BiSS interface is used as the measuring system.
Areas of application: The focus axis is suitable for high-precision applications in the fields of lithography, mask exposure, scanning applications or generally for positioning optics and sensors. Thanks to its compact dimensions and low system weight, the axis can be easily integrated into many applications. The air bearing and the materials used predestine the focus axis for clean room applications.
Specifications
Type | Unit | Value |
|---|---|---|
| Stroke | ||
| Position Accuracy | ||
| Axial Tilt of the Axis over entire travel | ||
| Axial Tilt of the Axis over 0.2 mm travel | ||
Mechanical Data | ||
| Mounting Position | ||
| Dimensions L x B x H | ||
| Diameter Opening | ||
| Mounting Thread for Focus Lens | ||
| Max. Permissible Load | ||
| Moving Mass (housing) | ||
| Total Mass | ||
| Weight Compensation | ||
| Material Housing | ||
| Material Stator | ||
Encoder | ||
| Type | ||
| Resolution | ||
| Output Signal | ||
Drive | ||
| Type | ||
| Max. Intermediate Circuit Voltage | ||
| Continuous Force @ Pv 16 W | ||
| Peak Force @ ED 10 % | ||
Environment and Interfaces | ||
| Supply Pressure | ||
| Air Consumption | ||
| Clean-Room Suitability | ||
Drive Control | ||
| Standard | ||
| High End |
