Focus Axis
EZ-5504 | Key Features
- Compact Design
- Stroke 18 mm
- Position Accuracy << 100 nm
- Dynamic Movement via Voice Coil
- Permanent Magnetic Weight Compensation
- For Optics up to 300 g
Downloads
Product description
With the EZ-5504 focus axis, EIZENBERGER has implemented a completely new and innovative axis concept. The external features are compact dimensions of 99 x 99 x 80 mm (L x W x H) and a central, continuous opening of approx. 35 mm for optical components. The slip-stick-free air bearing enables maximum precision over the entire stroke range of 18 mm and repeatability in the nanometer range. In addition to the extremely low position error, the low tilt error of the axis is particularly noteworthy. The focus axis is permanently magnetically weight compensated and designed for a payload of 250 g. The weight compensation is adjustable for masses from 50 to 300 g. The focus axis can be moved dynamically via a voice coil motor. A Renishaw measuring head with a resolution of 1 nm and a BiSS-C interface is used as the measuring system.
Applications: The focus axis is suitable for high-precision applications in the fields of lithography, mask exposure, scanning applications or generally for positioning optics and sensors. Due to the compact dimensions and the low system weight, the axis can be easily integrated into many applications. The air bearing and the materials used predestine the focus axis for clean room applications.
Specifications
Type | Unit | Value |
|---|---|---|
| Stroke | ||
| Position Accuracy | ||
| Axial Tilt of the Axis over entire travel | ||
| Axial Tilt of the Axis over 0.2 mm travel | ||
Mechanical Data | ||
| Mounting Position | ||
| Dimensions L x B x H | ||
| Diameter Opening | ||
| Mounting Thread for Focus Lens | ||
| Max. Permissible Load | ||
| Moving Mass (housing) | ||
| Total Mass | ||
| Weight Compensation | ||
| Material Housing | ||
| Material Stator | ||
Encoder | ||
| Type | ||
| Resolution | ||
| Output Signal | ||
Drive | ||
| Type | ||
| Max. Intermediate Circuit Voltage | ||
| Continuous Force @ Pv 16 W | ||
| Peak Force @ ED 10 % | ||
Environment and Interfaces | ||
| Supply Pressure | ||
| Air Consumption | ||
| Clean-Room Suitability | ||
Drive Control | ||
| Standard | ||
| High End |
