Products » Multi-Axis Systems
Travel Range 250 mm x 450/800 mm
Travel Range 500/600 mm x 500 mm | Repeatability ± 50 nm
Travel Range 350 x 450 mm | Repeatability ± 20 nm
Travel Range 850 mm x 500 mm | Step to Step Accuracy < 1 nm
Stroke in Z 5 mm | Rotation Angle ± 3°
Stroke in Z 310 mm | Rotary table with high load capacity
