XY-Gantry Stage

EZ-0714 | Key Features

  • Travel Range 500 / 600 mm x 500 mm
  • High Accuracy
  • Max. Load 500 N
  • Coplanar Axis Movement
  • With and Without Bellows Cover
  • Suitable for Particle-laden Processes

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Product description

The EZ-0714 gantry stage is designed for positioning tasks with high accuracy requirements, making it particularly versatile in use. Due to the optional equipment with bellows, the stage is suitable for particle-laden processes as well as for laser machining processes. The coplanar arrangement of the axes and the gantry design ensure very high repeatability and positioning accuracy. All air bearings are magnetically preloaded. Cable management is designed to minimize mechanical interference. The iron-core synchronous motors enable an acceleration of up to 10 m/s2 and a travel speed of up to 1 m/s. The machine bed is made of granite. Extention by a Z Axis is possible. The XY Stage is available in 2 sizes, with a travel range of 500 x 500 mm or 500 x 600 mm.

Applications: Positioning, scanning, exposure, laser engraving, laser processes in general.

Specifications

Type
Unit
500 x 500 mm
600 x 500 mm
Stroke
mm
500 x 500
600 x 500
Positioning Accuracy (non-compensated)
μm
± 3
± 3
Repeatability (bidirectional) 1)
nm
± 50
± 50
Position Stability 1)
nm
50
50
Vertical/Horizontal Straightness
μm
3
3
Pitch
μrad
15
15
Yaw
μrad
10
10
Max. Speed unloaded
m/s
1
1
Max. Acceleration unloaded
m/s2
10
10
Mechanical Data
Unit
500 x 500 mm
600 x 500 mm
Mounting Position
horizontal
horizontal
Dimension L x W x H
mm
1408 x 1248 x 405
1612 x 1380 x 405
Max. Load in Z
N
500
500
Moving Mass Y
kg
45
45
Moving Mass X + Y
kg
113
113
Total Mass
kg
1413
1650
Encoder
500 x 500 mm
600 x 500 mm
Type 2)
incremental
incremental
Sensor Signal
1 Vss, 20 μm signal period
1 Vss, 20 μm signal period
Drive
Unit
500 x 500 mm
600 x 500 mm
Type
3-phase, synchronous, iron-core
3-phase, synchronous, iron-core
Max. Voltage ph-ph
VAC
400
400
Continuous Force X / Y
N
1280 / 480
1280 / 480
Peak Current X / Y
Arms
16 / 12
16 / 12
Back-EMK ph-ph X / Y
V/m/s
76
76
Force Constant
N/A
93
93
Interfaces and Environment
Unit
500 x 500 mm
600 x 500 mm
Supply Pressure
bar
5
5
Air Consumption
Sl/min
18
18
MTBF
h
> 20 000
> 20 000
Limit Switch
PNP
PNP
Clean Room Suitability 3)
applicable
applicable
Drive Control
500 x 500 mm
600 x 500 mm
Standard
Kollmorgen Servostar AKD / S300 / S700
Kollmorgen Servostar AKD / S300 / S700
High End
ACS Controller mit UDMpa Drive; Triamec TSD130
ACS Controller mit UDMpa Drive; Triamec TSD130
1) measured with ACS amplifier
2) absolute encoder possible on request
3) without bellows, depending on detail design
EZ-0714 XY-Gantry Stage

Control

We offer the EZ-0714 with the following drive controllers:

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