XY-Gantry Stage
EZ-0714 | Key Features
- Travel Range 500 / 600 mm x 500 mm
- High Accuracy
- Max. Load 500 N
- Coplanar Axis Movement
- With and Without Bellows Cover
- Suitable for Particle-laden Processes
Downloads
Product description
The EZ-0714 gantry stage is designed for positioning tasks with high accuracy requirements, making it particularly versatile in use. Due to the optional equipment with bellows, the stage is suitable for particle-laden processes as well as for laser machining processes. The coplanar arrangement of the axes and the gantry design ensure very high repeatability and positioning accuracy. All air bearings are magnetically preloaded. Cable management is designed to minimize mechanical interference. The iron-core synchronous motors enable an acceleration of up to 10 m/s2 and a travel speed of up to 1 m/s. The machine bed is made of granite. Extention by a Z Axis is possible. The XY Stage is available in 2 sizes, with a travel range of 500 x 500 mm or 500 x 600 mm.
Applications: Positioning, scanning, exposure, laser engraving, laser processes in general.
Specifications
Type | Unit | 500 x 500 mm | 600 x 500 mm |
|---|---|---|---|
| Stroke | |||
| Positioning Accuracy (non-compensated) | |||
| Repeatability (bidirectional) 1) | |||
| Position Stability 1) | |||
| Vertical/Horizontal Straightness | |||
| Pitch | |||
| Yaw | |||
| Max. Speed unloaded | |||
| Max. Acceleration unloaded | |||
Mechanical Data | |||
| Mounting Position | |||
| Dimension L x W x H | |||
| Max. Load in Z | |||
| Moving Mass Y | |||
| Moving Mass X + Y | |||
| Total Mass | |||
Encoder | |||
| Type 2) | |||
| Sensor Signal | |||
Drive | |||
| Type | |||
| Max. Voltage ph-ph | |||
| Continuous Force X / Y | |||
| Peak Current X / Y | |||
| Back-EMK ph-ph X / Y | |||
| Force Constant | |||
Interfaces and Environment | |||
| Supply Pressure | |||
| Air Consumption | |||
| MTBF | |||
| Limit Switch | |||
| Clean Room Suitability 3) | |||
Drive Control | |||
| Standard | |||
| High End |
2) absolute encoder possible on request
3) without bellows, depending on detail design
Control
We offer the EZ-0714 with the following drive controllers:
