XY Stage

EZ-0117 | Key Features

  • Travel Range 250 mm x 450/800 mm
  • Max. Speed 1 m/s
  • High Accuracy
  • Max. Load 500 N
  • Fully Covered Machine Interior
  • Ideal for Particle Generating Machining Processes

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Product description

In the design of the XY Stage EZ-0117, particular emphasis was placed on a cost-conscious design combined with high accuracy requirements. The treads for the air bearings are covered with bellows to prevent the ingress of particles, making the EZ-0117 particularly suitable for particle-loaded applications. Despite being equipped with bellows, a high level of positioning accuracy is achieved. Iron-core synchronous motors allow acceleration of up to 10 m/s2 and a travel speed of up to 1 m/s. The machine bed is made of granite. An interface plate is provided on the side of the cross table for the transmission of energy, signals and media. Both axes can be supplied separately with electrical and pneumatic energy. The end position is detected by inductive sensors. The XY Stage is available in 2 sizes, with a travel range of 250 x 450 mm or 250 x 800 mm. Other dimensions or extensions of the two-axis system are possible on request.

Applications: Positioning, scanning, exposure, laser engraving, laser processes in general.

Specifications

Type
Unit
EZ-0117-450
EZ-0117-800
Article No.
0030823
0026390
Stroke
mm
250 x 450
250 x 800
Positioning Accuracy (non-compensated)
μm
± 2
± 2
Repeatability (bidirectional) 1)
nm
± 75
± 75
Position Stability 1)
nm
50
50
Vertical/Horizontal Straightness
μm
2
3
Pitch
μrad
20
20
Yaw
μrad
10
10
Max. Speed unloaded
m/s
1
1
Max. Acceleration unloaded
m/s2
10
10
Mechanical Data
Unit
EZ-0117-450
EZ-0117-800
Mounting Position
horizontal
horizontal
Dimension L x W x H
mm
1198 x 1201 x 297
1216 x 1540 x 297
Max. Load in Z
N
500
500
Moving Mass Y
kg
18
18
Moving Mass X + Y
kg
80
80
Total Mass
kg
675
850
Encoder
EZ-0117-450
EZ-0117-800
Type 2)
incremental
incremental
Sensor Signal
1 Vpp, 20 μm signal period
1 Vpp, 20 μm signal period
Drive
Unit
EZ-0117-450
EZ-0117-800
Type
3-phase, synchronous, iron-core
3-phase, synchronous, iron-core
Max. Voltage ph-ph
VAC
400
400
Continuous Force X / Y
N
640 / 320
640 / 320
Peak Current X / Y
A
16 / 8
16 / 8
Back-EMK ph-ph X / Y
V/m/s
76
76
Force Constant
N/A
93
93
Interfaces and Environment
Unit
EZ-0117-450
EZ-0117-800
Supply Pressure
bar
5
5
Air Consumption
Sl/min
20
20
MTBF
h
> 20 000
> 20 000
Limit Switch
PNP
PNP
Clean Room Suitability 3)
applicable
applicable
Drive Control
EZ-0117-450
EZ-0117-800
Standard
Kollmorgen Servostar AKD / S300 / S700
Kollmorgen Servostar AKD / S300 / S700
High End
ACS Controller with NanoPWM Drive; Triamec TSD130
ACS Controller with NanoPWM Drive; Triamec TSD130

1) measured with ACS amplifier
2) absolute encoder possible on request
3) without bellows, depending on detail design

EZ-0117 XY-Stage
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