Rotary Table

EZ-0275 | Key Features

  • Air Bearing Rotary Table with Direct Drive
  • Radial Runout < 0.1 μm
  • Angular Accuracy < ±0.5 arcsec
  • 660 U/min in Standard Version
  • 1 Vpp or with Interpolation (5-, 10-, 50-, 100-fold)

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Product description

The EZ-0275 is a long-proven, direct-driven rotary table of medium size. Due to the torque motor (IDAM RMF 2- or 3-phase) dynamic applications up to 660 rpm can be realized. The rotary table is particularly suitable for applications that require very precise rotary motion and high repeatability. The measuring system (Numerik Jena RIK4) with 18,000 lines can optionally be supplied with interpolation factors of 5, 10, 50 or 100. Lower interpolation values allow for higher speeds, while higher interpolation values improve repeatability. The rotor is magnetically preloaded and clamps to the housing when the air supply is switched off, ensuring it remains fixed in position. There are no restrictions regarding the installation orientation. Due to the materials used and the fact that air bearings are generally operated without lubricants, the rotary table is suitable for use in clean rooms. The maximum permissible payload is 600 N.

Applications: High-precision positioning and measuring systems, inspection technology, testing systems, calibration systems, optical alignment, applications with high demands for synchronization and/or repeatability in positioning.

Specifications

Type
Unit
2 phase
3 phase
Turning Range
°
> 360 (unlimited)
> 360 (unlimited)
Error Motion axial (in the center)
μm
< 0.1
<0,1
Error Motion radial (at 20 mm height)
μm
< 0.1
<0,1
Runout axial (along radius 35 mm)
μm
1
1
Repeatability (compensated)1)
arcsec
± 0.3
± 0,3
Accuracy (compensated)1)
arcsec
± 0.5
± 0,5
Max. Speed2)
rpm/min
660
660
Mechanical Data
Unit
2 phase
3 phase
Mounting Position
unrestricted
unrestricted
Diameter x Hight
mm
149 x 80
149 x 85
Moving Mass (rotor)
kg
3
3
Total Mass
kg
5,9
6,5
Max. Load Capacity axial push/pull
N
600 / 200
600 / 200
Nominal Load Capacity axial push/pull
N
480 / 160
480 / 160
Max. Load Capacity radial
N
225
225
Nominal Load Capacity radial
N
180
180
Stiffness axial
N/µm
100
100
Stiffness radial
N/µm
15
15
Max. Moment of Tilt
Nm
14
14
Inertial Moment
kg*m2
0,0027
0,0027
Material
aluminium anodized, steel
aluminium anodized, steel
Encoder
Unit
2 phase
3 phase
Type
incremental
incremental
Lines per Revolution
18.000
18.000
Output Signal
1Vpp / RS422
1Vpp / RS422
Interpolation Options
5, 10, 50, 100-fold
5, 10, 50, 100-fold
Drive
Unit
2 phase
3 phase
Type
synchronous, iron-core
synchronous, iron-core
Intermediate Circuit Supply 2-/3-phase
VDC
60 V
120 V
Nominal / Peak Torque
Nm
0,76 / 2,08
0,8 / 2,6
Nominal / Peak Current
A rms
1,4 / 3,8
0,9 / 6
Interfaces and Environment
Unit
2 phase
3 phase
Supply Pressure
bar
5
5
Air Consumption
Nl/min
ca.13
ca.13
Cable Length
m
1,5
1,5
Clean Room Suitability
applicable
applicable
Drive Control
2 phase
3 phase
Standard
JAT Ecovario 214 AR
AKD P00606
High end
ACS Controller
ACS Controller
1) depending on drive control
2) depending on interpolation value
EZ-0275 Rotary Table
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