Rotary Table

EZ-0275 | Key Features

  • Air Bearing Rotary Table with Direct Drive
  • Radial Runout < 0.1 μm
  • Angular Accuracy < ±0.5 arcsec
  • 660 U/min in Standard Version
  • 1 Vpp or with Interpolation (5-, 10-, 50-, 100-fold)

Downloads

Product description

The EZ-0275 is a long proven, direct-driven rotary table of medium size. Due to the torque motor (IDAM RMF 2- or 3-phase) dynamic applications up to 660 rpm can be realized. The rotary table is particularly suitable for applications requiring very precise rotary motion and high repeatability requirements. The measuring system (Numerik Jena RIK4) with 18,000 lines can optionally be supplied with an interpolation factor of 5, 10, 50 or 100. Low interpolation values allow higher speeds, higher interpolation values increase the repeatability. The rotor is magnetically preloaded, it is clamped to the housing when the air supply is switched off and remains fixed in its position. There are no restrictions with regard to the installation position. Due to the materials used and because air bearings are basically operated without lubricants, the rotary table is suitable for use in clean rooms. The max. permissible payload is 600 N.

Applications: High-precision positioning and measuring systems, inspection tecnology, testing systems, calibration systems, optical alignment, applications with high demands on synchronization and/or repeatability of positioning.

Specifications

Type
Unit
2 phase
3 phase
Turning Range
°
> 360 (unlimited)
> 360 (unlimited)
Error Motion axial (in the center)
μm
< 0.1
<0,1
Error Motion radial (at 20 mm height)
μm
< 0.1
<0,1
Runout axial (along radius 35 mm)
μm
1
1
Repeatability (compensated)1)
arcsec
± 0.3
± 0,3
Accuracy (compensated)1)
arcsec
± 0.5
± 0,5
Max. Speed2)
rpm/min
660
660
Mechanical Data
Unit
2 phase
3 phase
Mounting Position
unrestricted
unrestricted
Diameter x Hight
mm
149 x 80
149 x 85
Moving Mass (rotor)
kg
3
3
Total Mass
kg
5,9
6,5
Max. Load Capacity axial push/pull
N
600 / 200
600 / 200
Nominal Load Capacity axial push/pull
N
480 / 160
480 / 160
Max. Load Capacity radial
N
225
225
Nominal Load Capacity radial
N
180
180
Stiffness axial
N/µm
100
100
Stiffness radial
N/µm
15
15
Max. Moment of Tilt
Nm
14
14
Inertial Moment
kg*m2
0,0027
0,0027
Material
aluminium anodized, steel
aluminium anodized, steel
Encoder
Unit
2 phase
3 phase
Type
incremental
incremental
Lines per Revolution
18.000
18.000
Output Signal
1Vpp / RS422
1Vpp / RS422
Interpolation Options
5, 10, 50, 100-fold
5, 10, 50, 100-fold
Drive
Unit
2 phase
3 phase
Type
synchronous, iron-core
synchronous, iron-core
Intermediate Circuit Supply 2-/3-phase
VDC
60 V
120 V
Nominal / Peak Torque
Nm
0,76 / 2,08
0,8 / 2,6
Nominal / Peak Current
A rms
1,4 / 3,8
0,9 / 6
Interfaces and Environment
Unit
2 phase
3 phase
Supply Pressure
bar
5
5
Air Consumption
Nl/min
ca.13
ca.13
Cable Length
m
1,5
1,5
Clean Room Suitability
applicable
applicable
Drive Control
2 phase
3 phase
Standard
JAT Ecovario 214 AR
AKD P00606
High end
ACS Controller
ACS Controller
1) depending on drive control
2) depending on interpolation value
EZ-0275 Rotary Table
Cookie Consent with Real Cookie Banner