Rotary Table

EZ-0779 | Key Features

  • Air Bearing Rotary Table with Direct Drive
  • Load Capacity axial 3,000 N
  • Radial Runout < 0.1 μm
  • Velocity 500 U/min
  • Water-Cooled Motor

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Product description

The EZ-0779 rotary table with high axial load capacity and axial/radial error motion below 100 nm was originally developed for use in wafer processing; it is suitable for a wide range of applications. The direct- drive rotary table is equipped with a powerful water- cooled torque motor. Optionally, a rotary feedthrough with up to 6 air/vacuum channels can be integrated. The measuring system (Numerik Jena RIK4) with 18,000 lines can optionally be supplied with an interpolation factor of 5, 10, 50 or 100. Low interpolation values allow higher speeds, higher interpolation values increase the repeatability. There are no restrictions regarding the installation position.

Applications: Wafer grinding, wafer thinning, test systems, applications with high requirements on synchronization and/or positioning accuracy

Specifications

Type
Unit
2 phase
Turning Range
°
> 360 (unlimited)
Error Motion axial (in the center)
μm
<0.1
Error Motion radial (at 20 mm height)
μm
<0.1
Runout axial (along radius 35 mm)
μm
1
Max. Speed 1)
rpm
500
Mechanical Data
Unit
EZ-0779
Mounting Position
unrestricted
Diameter x Height
mm
300 x 345
Aperture
mm
50
Moving Mass (rotor)
kg
31
Total Mass
kg
70
Max. Load Capacity axial push/pull
N
2,700
Nominal Load Capacity axial push/pull
N
2,200
Max. Load Capacity radial
N
1,600
Nominal Load Capacity radial
N
1,300
Stiffness axial
N/µm
450
Stiffness radial
N/µm
130
Resistance Against Tilt
Nm/µrad
4
Max. Moment of Tilt
Nm
60
Inertial Moment
kg*m2
0.12
Material
aluminium anodized / stainless steel
Encoder
Unit
EZ-0779
Type
incremental
Lines per Revolution
18,000
Output Signal
1Vpp
Interpolation Options
5-, 10-, 50-, 100-fold
Drive
Unit
EZ-0779
Type
synchronous, iron-core
Intermediate Circuit Voltage
VDC
max. 400
Nominal / Peak Torque
Nm
60 / 218
Nominal / Peak Current
A rms
6.7 / 32.9
Interfaces and Environment
Unit
EZ-0779
Supply Pressure
bar
5
Air Consumption
Sl/min
ca.50
Clean Room Suitability
applicable
Drive Control
Standard
Kollmorgen AKD P00606 / Servostar S300
High end
ACS Controller

1) depending on interpolation value

EZ-0779 Rotary Table

Control

We offer the rotary table EZ-0779 with the following drive controllers:

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