Rotary Table
EZ-0779 | Key Features
- Air Bearing Rotary Table with Direct Drive
- Load Capacity axial 3,000 N
- Radial Runout < 0.1 μm
- Velocity 500 U/min
- Water-Cooled Motor
Downloads
Product description
The EZ-0779 rotary table with high axial load capacity and axial/radial error motion below 100 nm was originally developed for use in wafer processing; it is suitable for a wide range of applications. The direct- drive rotary table is equipped with a powerful water- cooled torque motor. Optionally, a rotary feedthrough with up to 6 air/vacuum channels can be integrated. The measuring system (Numerik Jena RIK4) with 18,000 lines can optionally be supplied with an interpolation factor of 5, 10, 50 or 100. Low interpolation values allow higher speeds, higher interpolation values increase the repeatability. There are no restrictions regarding the installation position.
Applications: Wafer grinding, wafer thinning, test systems, applications with high requirements on synchronization and/or positioning accuracy
Specifications
Type | Unit | 2 phase |
|---|---|---|
| Turning Range | ||
| Error Motion axial (in the center) | ||
| Error Motion radial (at 20 mm height) | ||
| Runout axial (along radius 35 mm) | ||
| Max. Speed 1) | ||
Mechanical Data | ||
| Mounting Position | ||
| Diameter x Height | ||
| Aperture | ||
| Moving Mass (rotor) | ||
| Total Mass | ||
| Max. Load Capacity axial push/pull | ||
| Nominal Load Capacity axial push/pull | ||
| Max. Load Capacity radial | ||
| Nominal Load Capacity radial | ||
| Stiffness axial | ||
| Stiffness radial | ||
| Resistance Against Tilt | ||
| Max. Moment of Tilt | ||
| Inertial Moment | ||
| Material | ||
Encoder | ||
| Type | ||
| Lines per Revolution | ||
| Output Signal | ||
| Interpolation Options | ||
Drive | ||
| Type | ||
| Intermediate Circuit Voltage | ||
| Nominal / Peak Torque | ||
| Nominal / Peak Current | ||
Interfaces and Environment | ||
| Supply Pressure | ||
| Air Consumption | ||
| Clean Room Suitability | ||
Drive Control | ||
| Standard | ||
| High end |
1) depending on interpolation value
Control
We offer the rotary table EZ-0779 with the following drive controllers:
