XY-Gantry Stage
EZ-0715 | Key Features
- Travel Range 350 mm x 450 mm
- High Precision Coplanar Axis System
- Gantry with Vacuum Preload Slide
- Ideal for Positioning Tasks in the nm Range
- Max. Load 250 N
- Extensible with Dynamic Z-/C-Axis
Downloads
Product description
The EZ-0715 Gantry Stage is designed for high precision applications. Incremental measuring systems (Heidenhain LIP6 G0) and an optimized design allow a positioning accuracy of ± 250 nm and a repeatability of ± 25 nm for the single axes. The vacuum-preloaded slide and optimized mass distribution enable high rigidity in the smallest installation space. Ironless motors enable an acceleration of up to 10 m/s2 and a travel speed of up to 1 m/s. The end position is detected by inductive sensors. The slides are supplied with energy separately via symmetrically attached drag chains. The machine bed of the Gantry Stage is made of granite. Both axes can be customized. The XY system can be expanded to include a Z- and/or C-Axis.
Applications: High-precision positioning tasks, scanning, exposure, laser engraving, laser processes in general.
Specifications
Type | Unit | Value |
|---|---|---|
| Stroke | ||
| Accuracy for Single Axis, compensated 1) | ||
| Repeatability (bidirectional) 2) | ||
| Position Stability | ||
| Vertikal Straightness, compensated | ||
| Horizontal Straightness | ||
| Pitch | ||
| Yaw X | ||
| Yaw Y | ||
| Max. Speed unloaded | ||
| Max. Acceleration unloaded | ||
Mechanical Data | ||
| Mounting Position | ||
| Dimension L x W x H (ca.) | ||
| Max. Load | ||
| Moving Mass Upper Axis | ||
| Moving Mass Lower Axis | ||
| Total Mass | ||
Encoder | ||
| Type 3) | ||
| Sensor Signal | ||
Drive | ||
| Type | ||
| Max. Voltage ph-ph | ||
| Continuous Force X (2 motors) / Y | ||
| Peak Current X / Y | ||
| Back-EMK ph-ph | ||
| Force Constant | ||
Interface and Environment | ||
| Supply Pressure | ||
| Air Consumption | ||
| MTBF | ||
| Limit Switch | ||
| Clean Room Suitability 4) | ||
Drive Control | ||
| High End |
1) in the middle of travel
2) in quasi static mode
3) absolute encoder possible on request
4) depending on detail design
Control
We offer the EZ-0715 gantry stage with the following drive controllers:
