High Precision Impulse Decoupled Stage
EZ-0730 | Key Features
- Y/X Stage with Vakuum Chuck
- Ultra High Speed
- Impulse Decoupled X Stage
- Short Move and Settle Time
- Repeatability in nm Range
- Reduced Weight due to Carbon Components
Downloads
Product description
Intelligent design gives the EZ-0730 stage maximum rigidity and excellent repeatability, minimizing axis crosstalk.
Built-in features:
- Impulse decoupling to minimize crosstalk even at high accelerations.
- Weight optimization by using carbon for the lower slide.
- Use of carbon structures with thermal expansion close to 0 to minimize harmful temperature effects.
- Extremely rigid chuck due to integrated flat 11-zone vacuum clamping device with high-precision tip/tilt adjustment using sophisticated pressure membrane technology.
- Minimization of disturbance forces emanating from the energy chain due to novel drag chain concept.
- Ironless drives and high-precision scales (Heidenhain LIP6 G0).
The machine bed is made of granite. The axes can be customized according to the customer’s requirements.
Applications: High-precision positioning, scanning, exposure, laser engraving, laser processes in general.
Specifications
Type | Unit | Value |
|---|---|---|
| Positioning Range | ||
| Accuracy for Individual Axis, compensated | ||
| Differental Accuracy Y Axis, step to step (3σ) | ||
| Repeatability (3σ, bidirectional) | ||
| Position Stability Y at max. acceleration X | ||
| Settle Time X-Axis (stoke 4 mm, position error < 20 nm) | ||
| Horizontal Straightness | ||
| Vertical Straightness (X Axis) | ||
| Pitch | ||
| Yaw | ||
| Tip/Tilt Adjustment Range | ||
| Tip/Tilt Adjustability | ||
| Max. Speed unloaded (X/Y) | ||
| Max. Acceleration unloaded (X/Y) | ||
Mechanical Data | ||
| Lower Axis (X) | ||
| Dimension B x W x H (without drag chain, incl. air springs) | ||
| Max. Payload (for dynamic applications) | ||
| Moving Mass Upper Axis (Y) | ||
| Moving Mass Lower Axis (X) | ||
| Total Mass | ||
Encoder | ||
| Type | ||
| Signal | ||
Drive | ||
| Type | ||
| Intermediate Circuit Supply | ||
| Constant Force X (2 drives) / Y | ||
| Peak Force X / Y | ||
| Back-EMK ph-ph X / Y | ||
| Force Constant | ||
Interfaces and Environment | ||
| Supply Pressure | ||
| Air Consumption | ||
| MTBF | ||
| Limit Switch | ||
| Clean Room Suitability | ||
Drive Control | ||
| High end |
