Air-Bearing ZC-Axis
EZ-0745-ZC | Key Features
- Linear Axis for Vertical Installation
- Rotation Angle ±3°
- Max. Load 10 kg
- Integrated Weight Compensation
- Absolute Linear Encoder
- Dynamic Drive by Voice Coils
- Integrable in X/Y Stages (e.g. EZ-0715)
Downloads
Product description
The EZ-0745 air-bearing ZC-axis is intended for integration into an XY-stage (e.g. EZ-0715). Due to the highly integrated design, only a low overall height of approx. 138 mm is required. The rotation angle is limited to ± 3°. A high repeatability of ± 1.5 μrad enables very precise alignment of the substrate. The Z-axis is secured against rotation via 2 air bearing pads and is dynamically driven by 2 opposing voice coils. An air-bearing pneumatic cylinder is integrated for weight decoupling. An individual, customer-specific adjustment of the Z-stroke is possible.
Applications: High-precision positioning tasks, scanning, exposure, laser engraving, laser processes in general.
Specifications
Type | Unit | Value |
|---|---|---|
| Rotation Angle (C) | ||
| Stroke in Z | ||
| Straightness (ZTX, ZTY) | ||
| Pitch, Yaw (ZRX, ZRY) | ||
| Roll (ZRZ) | ||
| Position Stability in Z 1) | ||
| Accuracy Z 1) | ||
| Position Accuracy C 1) | ||
| Repeatability C 1) | ||
| Max. Speed unloaded | ||
| Max. Acceleration unloaded | ||
Mechanical Data | ||
| Mounting Position | ||
| Diameter Cylinder x Height | ||
| Total Mass | ||
| Max. Load | ||
| Material | ||
Encoder | ||
| Type | ||
| Signal | ||
Drive | ||
| Drive Type C-Axis | ||
| Intermediate Circuit Voltage C-Axis | ||
| Nominal/Peak Force C-Axis | ||
| Nominal/Max. Current C-Axis | ||
| Drive Type Z-Axis | ||
| Intermediate Circuit Voltage Z-Axis | ||
| Nominal/Peak Force Z-Axis | ||
| Nominal/Max. Current Z-Axis at 48 V | ||
Interfaces and Environment | ||
| Supply Pressure | ||
| Air Consumption | ||
| Clean Room Suitability | ||
Drive Control | ||
| Standard | ||
| High End |
1) measured with ACS amplifier
Control
We offer the ZC-axis EZ-0745 with the following drive controls:
