Rotary Table
EZ-0778 Passive | Key Features
- Passive Air-Bearing Rotary Table
- High Load Capacity
- Error Motion < 0.1 μm
- Made of Stainless Steel
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Product description
The EZ-0778 passive rotary table features high axial and radial load capacity and stiffness. Due to the low error motion of < 100 nm, the table is ideal for rotary motion in high-precision machining processes. The air-bearing rotary table can be driven by an external motor via a bellows coupling and pulley. On request, these can be pre-assembled at the factory. There are no restrictions regarding the installation position.
Applications: As drive/bearing in the fields of precision turning, polishing, grinding, wafer grinding; for applications with high demands on concentricity.
Specifications
Type | Unit | EZ-0778 |
|---|---|---|
| Turning Range | ||
| Error Motion axial (in the center) | ||
| Error Motion radial (at 20 mm height) | ||
| Axial Runout (along radius 85 mm) | ||
| Max. Speed | ||
Mechanical Data | ||
| Mounting Position | ||
| Diameter x Height | ||
| Max. Load axial | ||
| Nominal Load axial push/pull | ||
| Max. Load radial | ||
| Nominal Load radial | ||
| Stiffness axial | ||
| Stiffness radial | ||
| Resistance Against Tilt | ||
| Max. Moment of Tilt | ||
| Moving Mass (rotor) | ||
| Total Mass | ||
| Inertialmoment | ||
| Material | ||
Interfaces and Environment | ||
| Supply Pressure | ||
| Air Consumption | ||
| Clean Room Suitability |
Fig.: Rotary table with pulley – pulley type acc. to customer requirement