Products » Multi-Axis Systems » EZ-0117 XY-Stage
XY Stage
EZ-0117 | Key Features
- Travel Range 250 mm x 450/800 mm
- Max. Speed 1 m/s
- High Accuracy
- Max. Load 500 N
- Fully Covered Machine Interior
- Ideal for Particle Generating Machining Processes
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Product description
In the design of the XY Stage EZ-0117, particular emphasis was placed on a cost-conscious design combined with high accuracy requirements. The treads for the air bearings are covered with bellows to prevent the ingress of particles, making the EZ-0117 particularly suitable for particle-loaded applications. Despite being equipped with bellows, a high level of positioning accuracy is achieved. Iron-core synchronous motors allow acceleration of up to 10 m/s2 and a travel speed of up to 1 m/s. The machine bed is made of granite. An interface plate is provided on the side of the cross table for the transmission of energy, signals and media. Both axes can be supplied separately with electrical and pneumatic energy. The end position is detected by inductive sensors. The XY Stage is available in 2 sizes, with a travel range of 250 x 450 mm or 250 x 800 mm. Other dimensions or extensions of the two-axis system are possible on request.
Applications: Positioning, scanning, exposure, laser engraving, laser processes in general.
Specifications
Type | Unit | EZ-0117-450 | EZ-0117-800 |
---|---|---|---|
Article No. | |||
Stroke | |||
Positioning Accuracy (non-compensated) | |||
Repeatability (bidirectional) 1) | |||
Position Stability 1) | |||
Vertical/Horizontal Straightness | |||
Pitch | |||
Yaw | |||
Max. Speed unloaded | |||
Max. Acceleration unloaded | |||
Mechanical Data | |||
Mounting Position | |||
Dimension L x W x H | |||
Max. Load in Z | |||
Moving Mass Y | |||
Moving Mass X + Y | |||
Total Mass | |||
Encoder | |||
Type 2) | |||
Sensor Signal | |||
Drive | |||
Type | |||
Max. Voltage ph-ph | |||
Continuous Force X / Y | |||
Peak Current X / Y | |||
Back-EMK ph-ph X / Y | |||
Force Constant | |||
Interfaces and Environment | |||
Supply Pressure | |||
Air Consumption | |||
MTBF | |||
Limit Switch | |||
Clean Room Suitability 3) | |||
Drive Control | |||
Standard | |||
High End |
1) measured with ACS amplifier
2) absolute encoder possible on request
3) without bellows, depending on detail design
Control
We offer the EZ-0117 stage with the following drive controllers: