Rotary Table
EZ-RP201 - Passive | Key Features
- Passive Air-Bearing Rotary Table
- Particularly Low Error Motion
- High Speed Operation Possible
- High Load Capacity and Stiffness
- Various Sizes Available
Downloads
Product description
With an axial error movement of < 30 nm and a radial error movement of < 50 nm, the EZ-RP201 rotary table series meets the highest requirements for concentricity. Due to the special H-design and an optimized bearing layout, a particularly high axial load capacity and stiffness are achieved. The stainless steel turntables can be driven via an externally flanged motor or via a belt pulley.
Applications: As drive/bearing in the fields of precision turning, polishing, grinding, wafer grinding; for applications with high demands on concentricity.
Specifications
Type | Unit | EZ-RP201-150 | EZ-RP201-200 | EZ-RP201-250 |
|---|---|---|---|---|
| Turning Range | ||||
| Error Motion axial (in the center) | ||||
| Error Motion radial (at 20 mm height) | ||||
| Axial Runout (measured on surface a/b)1) | ||||
| Radial Runout (measured on surface c/d)1) | ||||
| Max. Speed | ||||
Mechanical Data | ||||
| Mounting Position | ||||
| Diameter x Height | ||||
| Diameter Rotor | ||||
| Moving Mass (rotor) | ||||
| Total Mass | ||||
| Max. Load axial | ||||
| Nominale Load axial push/pull | ||||
| Max. Load radial | ||||
| Nominale Load radial | ||||
| Stiffness axial | ||||
| Stiffness radial | ||||
| Max. Moment of Tilt | ||||
| Inertialmoment | ||||
Interfaces and Environment | ||||
| Supply Pressure | ||||
| Air Consumption | ||||
| Clean Room Suitability |
1) see figure below left
Measuring Surfaces:
Mounting Options:
– with M10 screws using the M10 threads
– with M8 screws using the M10 countersunk bores
