Multi-Axis Systems - Eitzenberger GmbH - Luftlager

Products » Multi-Axis Systems

EZ-0117 XY-Stage

Travel 250 mm x 450/800 mm | Repeatability ± 75 nm

EZ-0714 XY-Gantry Stage

Travel Range 500/600 mm x 500 mm | Repeatability ± 50 nm

EZ-GS0760 Dynamic Wafer Stage

Travel Range 450 x 400 | Repeatablility ± 40 nm

EZ-0730 High Precision Impulse Decoupled Stage

Travel Range 850 mm x 500 mm | Step to Step Accuracy < 1 nm

EZ-0715 High Precision Gantry Stage

Travel Range 350 x 450 mm | Repeatability ± 20 nm

EZ-0745 ZC-Axis

Stroke in Z 5 mm | Rotation Angle ± 3°

EZ-4360 ZC-Motion System

Stroke in Z 310 mm | Rotary table with high load capacity

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